Practicum of Electron Beam Lithography

                Xiaoshu Chen

                                            University of Rochester, Materials Science Program

                                                                                                             Rochester, NY 14627 chenxshu.ur@gmail.com

                                                                                                                                   OPT407: SEM Practicum   Final Project , Spring 2010
                                                                                                                                                                                                                                                                                                                        
 CONTENT
ABSTRACT

ELECTRON BEAM LITHOGRAPHY
  1. Sample Preparation
  2. Pattern design
  3. Pattern writing
  4. Develop
  5. Coating
RESULTS & DISCUSSIONS
  1. SEM
  2. AFM
  3. Interaction Simulation

LAST THOUGHTS
  1. Conclusions
  2. Acknowledgement
  3. References
  4. Comment



ABSTRACT

This project is aimed to practice Electron Beam Lithography (EBL) by fabricating some fine periodical structures and irregularly shaped structures. Nanorods arrays with surrounding Bragg mirrors were fabricated, together with overlapping double circles, neighboring triangles. Furthermore, there are some Chinese traditional marriage totem and giant panda faces. The patterns were observed with Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM).